All-stable-point out ultraviolet lasers are already greatly Employed in the fields of mechanical flaw detection, lithography, micromachining and drugs for some great benefits of smaller quantity, lengthy daily life, higher effectiveness, great beam high quality, extensive tuning and narrow spectral line, etcetera. Making use of large electricity near-infrared coherent mild supply as the basic frequency resource dependant on nonlinear tuning technological innovation, making ultraviolet coherent radiation by multistage frequency conversion is considered a very important way to create the ultraviolet coherent gentle source.
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For illustration, The present concave OC could be replaced by a aircraft mirror which could mitigate the power density around the surface of M1 as well as the diamond. In addition, utilizing significant destruction threshold coatings for M1 and diamond would also Enhance the output electric power with no damages. Then, the NIR laser in the 2nd Stokes wavelength could be significant adequate, and its excellent beam excellent, to deliver the ultimate DUV laser at 193 nm having a large average ability.
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Due to thermal lens result inside the good-condition lasers, In the event the heating administration is insufficient, It isn't click here easy to acquire the strong-point out laser that has a higher electrical power as well as a substantial beam top quality at the same time. Just lately, with the event of the thin disk laser and solitary-crystal fiber (SCF) laser, a higher-electrical power laser at the fundamental wavelength (1 μm) were understood with an excellent beam excellent even with a TEM00 mode beam [4,24], which would be excellent candidates for the basic on the DUV laser era. A different candidate for the basic would be the significant-ability fiber laser which can be obtained by coherent beam mixture with M2 benefit less than one.
On one other facet, the facility scaling with the NIR laser is an additional facet to improve the regular electricity on the 193-nm DUV laser. A result of the lack of the superior-energy amplification Resolution from the NIR laser (such as at 1553 nm), nonlinear frequency processes which include optical parameter oscillation (OPO) could possibly be placed on develop a wavelength converter by shifting the wavelength from one μm to the specified wavelength together with getting relative increased electrical power [21]. Recently, a diamond Raman laser confirmed its capability in obtaining a high energy plus a higher conversion performance on the 1st Stokes of your one-μm laser [22,23], which implies the likelihood being applied in the 193-nm DUV laser technology thanks to its superior Raman attain and enormous frequency change.
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Cesium Lithium Borate (CsLiB6O10 or CLBO) is the best non-linear crystal which generates ultraviolet harmonics on the Nd:YAG elementary laser wavelength. So as to enrich the hurt threshold, lower CLBO surface area roughness, by extremely-precision machining, is required. Because the CLBO crystal has simple hydroscopic response and micro scratches in machining, extremely-precise machining of your CLBO crystal is often a hard specialized problem.
The beam profile proven in Figure 7b shown a good beam top quality as on the list of merits of Raman laser, which would be advantageous to create a 193-nm DUV laser with a high quality beam.
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